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Ultra-High Purity Regulators

Single Stage Electropolished 316L Stainless Steel Bar-stock Body – Two, Three and Four Port Configurations VCR Connections

 

The 7002 and 7003 Series regulators are intended for secondary pressure control of the highest Purity Gases or as point of use pressure control in semiconductor process gas distribution systems. The 7004 Series regulators are intended for primary pressure control of semiconductor process gases as well as applications requiring constant delivery pressure control, regardless of supply pressure variations.

Typical Application

  • Semiconductor process gases N Gas and liquid chromatography
  • Ultra high purity carrier gases
  • Zero, span, and calibration gases

Specifications

  • Operating Pressure Vacuum to 500 psig (241 bar)
  • Temperature Range: -40 °F to 140 °F (-40 °C to 60 °C)
  • Ports: 1/4” VCR
  • Helium Leak Integrity: 1 × 10-9 scc/sec
  • Cv: 0.06

Materials

  • Body: 316L stainless steel
  • Bonnet: Chrome-plated brass barstock
  • Nozzle: 316L stainless steel
  • Spring: Elgiloy®
  • Seat: KEL-F® 81
  • Poppet: Stainless steel
Praxair Regulators


Features and Benefits of the 702, 703, and 704 Series Regulators

  • Butt-welded VCR connections
  • Highest leak integrity available
  • 316 stainless steel bar-stock body
  • Enhanced corrosion resistance
  • Front and rear panel mountable
  • Versatile system configuration
  • Pressure ranges 0-15 to 0-500 psig
  • Broad range of applications
  • 3000 psig inlet pressure rating
  • Safe use with high pressure cylinders
  • Metal-to-metal diaphragm seal\
  • Reduces possibility of gas contamination
  • 316L stainless steel diaphragm
  • No inboard diffusion
  • Orientable captured vent capable
  • Safe and easy installation
  • Field adjustable pressure limit
  • Safeguard downstream equipment

Ordering Information

Part No.Outlet Pressure Outlet Gauge

Inlet Gauge

Port Configuration

Assembly / Gauges

Series 7002

1: 0-15 psig 

2: 0-50 psig

3: 0-100 psig

0: None 0: None 

0: 1/4" Tube Stub 

1: FVCR x MVCR

2: MVCR x MVCR

3: MVCR x FVCR

4: FVCR x FVCR

5: IFS x IFS

(IFS = Internal Face Seal)

0: Bare Body 

1: Standard Assembly

Series 7003 

1: 0-15 psig

2: 0-50 psig

3: 0-100 psig

30" -0-30 psig

30" -0-100 psig

30" -0-200 psig

0: None

0: 1/4" Tube Stub

1: FVCR x MVCR

2: MVCR x MVCR

3: MVCR x FVCR

4: FVCR x FVCR

5: IFS x IFS

0: Bare Body (Welded Gauge Ports)

1: Standard Assembly (Welded Gauge Ports)

2: Bare Body (IFS Gauge Ports)

3: Standard Assembly (IFS Gauge Ports)

Series 7004

1: 0-15 psig

2: 0-50 psig

3: 0-100 psig


30" -0-30 psig

30" -0-100 psig

30" -0-200 psig

0: None 

3: 0-4000 psig

6: 0-1000 psig

0: 1/4" Tube Stub

1: FVCR x MVCR

2: MVCR x MVCR

3: MVCR x FVCR

0: Bare Body (Welded Gauge Ports)

1: Standard Assembly (Welded Gauge Ports)

2: Bare Body (IFS Gauge Ports)

3: Standard Assembly (IFS Gauge Ports)

Other outlet pressure ranges available upon request. 

Download Brochure 

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UHP Regulators Brochure

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